ASTM-E2244 2005

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E2244-05 Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer

Published By	Publication Date	Number of Pages
ASTM	2005	11

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Categories: 37.040.20 - Photographic paper, films and plates. Cartridges, ASTM

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Description

1.1 This test method covers a procedure for measuring in-plane lengths (including deflections) of patterned thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer.

1.2 There are other ways to determine in-plane lengths. Using the design dimensions typically provides more precise in-plane length values than using measurements taken with an optical interferometer. (Interferometric measurements are typically more precise than measurements taken with an optical microscope.) This test method is intended for use when interferometric measurements are preferred over using the design dimensions (for example, when measuring in-plane deflections and when measuring lengths in an unproven fabrication process).

1.3 This test method uses a non-contact optical interferometer with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.

1.4 The maximum in-plane length measured is determined by the maximum field of view of the interferometer at the lowest magnification. The minimum deflection measured is determined by the interferometers pixel-to-pixel spacing at the highest magnification.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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PDF Pages	PDF Title
1	Scope Referenced Documents Terminology
3	Summary of Test Method FIG. 1 FIG. 2
4	FIG. 3 FIG. 4 TABLE 1
5	Significance and Use Apparatus Test Units Calibration
6	( )
7	Calculation Report Precision and Bias
8	FIG. 5 TABLE 2 TABLE 3 TABLE 4
9	Keywords X1. OBTAINING THE ENDPOINTS OF AN IN-PLANE LENGTH MEASUREMENT FOR A BULK-MICROMACHINED STRUCTURE OR A SURFACE-MICROMACHINED STRUCTURE WITH TRANSITIONAL EDGES GREATER THAN 8 µm IN HEIGHT X1.1 TABLE 5 FIG. X1.1
10	X1.2 X1.3 X1.4 X1.5 FIG. X1.2
11	X1.6 REFERENCES

Additional information

Standard Title	E2244-05 Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer
Published Code	ASTM
Publication Date	2005
Pages Count	11
ICS Codes	37.040.20 - Photographic paper, films and plates. Cartridges

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ASTM-E2244 2005

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