ASTM-E2530 2006

$40.63

E2530-06 Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps

Published By	Publication Date	Number of Pages
ASTM	2006	6

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Categories: 71.040.50 - Physicochemical methods of analysis, ASTM

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Description

1.1 This practice covers a measurement procedure to calibrate the z-scale of an atomic force microscope using Si(111) monatomic step height specimens.

1.2 Applications This procedure is applicable either in ambient or vacuum condition when the atomic force microscope (AFM) is operated at its highest levels of z-magnification, that is, in the nanometer and sub-nanometer ranges of z-displacement. These ranges of measurement are required when the AFM is used to measure the surfaces of semiconductors, optical surfaces, and other high technology components.

1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

PDF Catalog

PDF Pages	PDF Title
1	Scope Referenced Documents Terminology Significance and Use Calibration Specimen
2	Apparatus Procedure Report FIG. 1
3	FIG. 2 FIG. 3
4	Uncertainty Potential Alternative Keywords A1. PROCEDURE FOR FABRICATION OF SI(111) MONATOMIC STEP HEIGHT SPECIMENS A1.1 FIG. A1.1
5	A1.2 A1.3 Thermal Technique A1.4 Wet-Chemical Etching
6	REFERENCES FIG. A1.2

Additional information

Standard Title	E2530-06 Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps
Published Code	ASTM
Publication Date	2006
Pages Count	6
ICS Codes	71.040.50 - Physicochemical methods of analysis

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ASTM-E2530 2006

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