ASTM-E766 2008

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E766-98(2008)e1 Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope

Published By	Publication Date	Number of Pages
ASTM	2008	6

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Category: ASTM

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Description

1.1 This practice covers general procedures necessary for the calibration of magnification of scanning electron microscopes. The relationship between true magnification and indicated magnification is a complicated function of operating conditions. Therefore, this practice must be applied to each set of standard operating conditions to be used.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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PDF Pages	PDF Title
1	Scope Referenced Documents Terminology
2	Significance and Use Calibration Specimen Procedure
3	FIG. 1
4	Report Precision and Bias FIG. 2
5	Application of Magnification Accuracy to the Measurement of Sample Detail Keywords FIG. 3
6	A1. PARAMETERS THAT INFLUENCE THE RESULTANT MAGNIFICATION OF AN SEM A1.1

Additional information

Standard Title	E766-98(2008)e1 Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
Published Code	ASTM
Publication Date	2008
Pages Count	6

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ASTM-E766 2008

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