ASTM-F522 1994

$35.75

F522-94 Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)

Published By	Publication Date	Number of Pages
ASTM	1994	4

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Description

ASTM F522-94

Withdrawn Standard: Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)

ASTM F522

Scope

Keywords

ICS Code

ICS Number Code 29.045 (Semiconducting materials)

DOI:

Additional information

Standard Title	F522-94 Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)
Published Code	ASTM
Publication Date	1994
Pages Count	4

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ASTM-F522 1994

$35.75


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