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BS EN ISO 14644-9:2022

BS EN ISO 14644-9:2022

$167.15

Cleanrooms and associated controlled environments – Assessment of surface cleanliness for particle concentration

Published By Publication Date Number of Pages
BSI 2022 40
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This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D. This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm. The following issues are not considered in this document: —    requirements for the cleanliness and suitability of surfaces for specific processes; —    procedures for the cleaning of surfaces; —     material characteristics; —    references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent; —    selection and use of statistical methods for assessment and testing; —    other characteristics of particles, such as electrostatic charge, ionic charges and microbiological state.

PDF Catalog

PDF Pages PDF Title
2 undefined
5 European foreword
Endorsement notice
9 Foreword
10 Introduction
12 1 Scope
2 Normative references
3 Terms and definitions
13 4 Abbreviated terms
14 5 The surface cleanliness level assessment system
5.1 ISO-SCP grading level format
17 5.2 Designation
5.3 General information on surface cleanliness levels of particle concentration
6 Demonstration of conformity
6.1 Principle
6.2 Testing
18 6.3 Test report
20 Annex A (informative) Surface characteristics
23 Annex B (informative) Descriptor for specific particle size ranges
26 Annex C (informative) Parameters influencing the SCP grading level assessments
28 Annex D (informative) Measurement methods for determining surface cleanliness by particle concentration
37 Bibliography

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BS EN ISO 14644-9:2022
$167.15