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BS IEC 60747-18-1:2019

$142.49

Semiconductor devices – Semiconductor bio sensors. Test method and data analysis for calibration of lens-free CMOS photonic array sensors

Published By Publication Date Number of Pages
BSI 2019 30
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This part of IEC 60747 specifies the test methods and data analysis for the calibration of lens-free CMOS photonic array sensors. This document includes the test conditions of each process, configuration of lens-free CMOS photonic array sensors, statistical analysis of test data, calibration for planarization and linearity, and test reports.

PDF Catalog

PDF Pages PDF Title
2 undefined
4 CONTENTS
6 FOREWORD
8 INTRODUCTION
10 1 Scope
2 Normative references
3 Terms and definitions
11 4 Measurement setup
4.1 General
4.2 Measurement system
4.2.1 Overall system
Figures
Figure 1 – Example of box plot
12 Figure 2 – Example of measurement system with integrating sphere
Figure 3 – Example of measurement system with incident parallel light
13 4.2.2 Dark box
4.2.3 Light source
4.2.4 Sensor board
Figure 4 – Example of photoelectric measurement schematic
14 4.2.5 Configuration parameters
5 Measurement
5.1 General
5.2 Case 1: Fixed wavelength (λ) of light
5.2.1 Planarization: At fixed λ and incident light intensity
Figure 5 – Measurement flow
15 Figure 6 – n trial data of frame capture
Figure 7 – Two frame subtracted data
16 5.2.2 Linearity: Varying the incident light intensity with a fixed wavelength
5.3 Case 2: Various wavelength (λ) of light
6 Data analysis
6.1 Data plot
6.1.1 General
Figure 8 – Dark frame subtracted data
17 Figure 9 – Example of output electric signal non-linearity of 2D pixel array
Figure 10 – Example of output electric signal non-linearity of one row of pixels
18 6.1.2 Sensor screening
6.2 Planarization characteristics
6.2.1 Criterion of determining the reference pixel
Figure 11 – Example of one pixel’s output electric signal according to input light power
19 6.2.2 Lookup table of representative value for planarization calibration of each pixel
6.3 Linearity
6.3.1 Criterion of linear region of each pixel
Figure 12 – Example of determining the reference pixel
Figure 13 – Example of the representative value for planarization
20 6.3.2 Criterion of light intensity effective area for linearity
6.3.3 Lookup table of the representative value for linearity calibration of each pixel
Figure 14 – Example of light intensity effective area for linearity
21 7 Calibration
7.1 Calibration lookup table
Figure 15 – Example of the representative value for linearity
Figure 16 – Example of a simplified pixel structure and cross-sectional viewwith bio reaction
22 7.2 Reference for establishing the representative output value in the effective area
Table 1 – Calibration lookup table
23 8 Test report
Figure 17 – Example of the representative value of the sensor
Table 2 – Representative value table of the sensor
25 Annex A (informative)Test report
A.1 Test environment specification
26 A.2 Specification of CMOS photonic array sensor
A.3 Calibration lookup table
A.4 Representative value look up table for planarization calibration of the sensor
27 A.5 Representative value look up table for linearity calibration of the sensor
28 Bibliography
BS IEC 60747-18-1:2019
$142.49