BS IEC 60747-18-1:2019
$142.49
Semiconductor devices – Semiconductor bio sensors. Test method and data analysis for calibration of lens-free CMOS photonic array sensors
Published By | Publication Date | Number of Pages |
BSI | 2019 | 30 |
This part of IEC 60747 specifies the test methods and data analysis for the calibration of lens-free CMOS photonic array sensors. This document includes the test conditions of each process, configuration of lens-free CMOS photonic array sensors, statistical analysis of test data, calibration for planarization and linearity, and test reports.
PDF Catalog
PDF Pages | PDF Title |
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2 | undefined |
4 | CONTENTS |
6 | FOREWORD |
8 | INTRODUCTION |
10 | 1 Scope 2 Normative references 3 Terms and definitions |
11 | 4 Measurement setup 4.1 General 4.2 Measurement system 4.2.1 Overall system Figures Figure 1 – Example of box plot |
12 | Figure 2 – Example of measurement system with integrating sphere Figure 3 – Example of measurement system with incident parallel light |
13 | 4.2.2 Dark box 4.2.3 Light source 4.2.4 Sensor board Figure 4 – Example of photoelectric measurement schematic |
14 | 4.2.5 Configuration parameters 5 Measurement 5.1 General 5.2 Case 1: Fixed wavelength (λ) of light 5.2.1 Planarization: At fixed λ and incident light intensity Figure 5 – Measurement flow |
15 | Figure 6 – n trial data of frame capture Figure 7 – Two frame subtracted data |
16 | 5.2.2 Linearity: Varying the incident light intensity with a fixed wavelength 5.3 Case 2: Various wavelength (λ) of light 6 Data analysis 6.1 Data plot 6.1.1 General Figure 8 – Dark frame subtracted data |
17 | Figure 9 – Example of output electric signal non-linearity of 2D pixel array Figure 10 – Example of output electric signal non-linearity of one row of pixels |
18 | 6.1.2 Sensor screening 6.2 Planarization characteristics 6.2.1 Criterion of determining the reference pixel Figure 11 – Example of one pixel’s output electric signal according to input light power |
19 | 6.2.2 Lookup table of representative value for planarization calibration of each pixel 6.3 Linearity 6.3.1 Criterion of linear region of each pixel Figure 12 – Example of determining the reference pixel Figure 13 – Example of the representative value for planarization |
20 | 6.3.2 Criterion of light intensity effective area for linearity 6.3.3 Lookup table of the representative value for linearity calibration of each pixel Figure 14 – Example of light intensity effective area for linearity |
21 | 7 Calibration 7.1 Calibration lookup table Figure 15 – Example of the representative value for linearity Figure 16 – Example of a simplified pixel structure and cross-sectional viewwith bio reaction |
22 | 7.2 Reference for establishing the representative output value in the effective area Table 1 – Calibration lookup table |
23 | 8 Test report Figure 17 – Example of the representative value of the sensor Table 2 – Representative value table of the sensor |
25 | Annex A (informative)Test report A.1 Test environment specification |
26 | A.2 Specification of CMOS photonic array sensor A.3 Calibration lookup table A.4 Representative value look up table for planarization calibration of the sensor |
27 | A.5 Representative value look up table for linearity calibration of the sensor |
28 | Bibliography |