BS IEC 62951-6:2019
$142.49
Semiconductor devices. Flexible and stretchable semiconductor devices – Test method for sheet resistance of flexible conducting films
| Published By | Publication Date | Number of Pages |
| BSI | 2019 | 28 |
IEC 62951-6:2019 specifies terms, as well as the test method and report of sheet resistance of the flexible conducting film under bending and folding tests. The measurement methods include the 2-point probe, 4-point probe and Montgomery method, which can be applied to in-situ and ex-situ measurement and the measurements of anisotropic sheet resistance.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 2 | undefined |
| 4 | English CONTENTS |
| 6 | FOREWORD |
| 8 | 1 Scope 2 Normative references 3 Terms and definitions |
| 9 | 4 Atmospheric conditions for evaluation and conditioning |
| 10 | 5 In situ measurements using 2-point probe method 5.1 General 5.2 Sample preparation 5.3 Test methods 5.3.1 Test apparatus Figures Figure 1 – Possible electric connection of 2-point probe measurement |
| 11 | 5.3.2 Measurement and data analysis 5.4 Report of results Figure 2 – Gauge section of bending test |
| 12 | 6 Uniformity measurement using 4-point probe method 6.1 General 6.2 Test methods 6.2.1 Test apparatus 6.2.2 Measurement and data analysis |
| 13 | 6.3 Report of results Figure 3 – Example of measuring positions Figure 4 – Direction of bending and collinear probes |
| 14 | 7 Anisotropic measurement using the Montgomery method 7.1 General 7.2 Test methods 7.2.1 Test apparatus 7.2.2 Measurement and data analysis |
| 15 | 7.3 Report of results Figure 5 – Resistance measurement with the Montgomery method |
| 16 | Annex A (informative) Bending tests Figure A.1 – Two common bending test methods for flexible substrates |
| 17 | Annex B (informative) 4-point probe measurements B.1 General B.2 Correction for finite sample size Figure B.1 – Schematic diagram of 4-point probe |
| 19 | Figure B.2 – Correction factor of square sample depending on length/probe spacing [2] |
| 20 | Figure B.3 – Correction factor depending on measuring position when collinear probes are directed vertically Figure B.4 – Correction factor depending on measuring position when collinear probes are directed horizontally |
| 21 | Figure B.5 – Correction factor, f depending on measuring positions anddirection of collinear probes |
| 22 | B.3 Correction factors accounting for finite size probe tips Figure B.6 – Example of probe with a finite contact diameter (e.g. 2mm) comparable to inter-distance between probes (e.g. 5 mm) |
| 23 | Figure B.7 – Dimensional sketch of probe with a finite contact diameter |
| 24 | Annex C (informative) Montgomery method C.1 General C.2 Sample preparation Figure C.1 – Possible contact placements of square or rectangular sample |
| 25 | C.3 Measurement of sheet resistance of isotropic sample Figure C.2 – Correction factors for finite contact size on resistivity measurement [4] |
| 26 | C.4 Measurement of anisotropic sheet resistance Figure C.3 – Resistance measurement of Montgomery method |
| 27 | Bibliography |
