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BS ISO 16700:2016 – TC:2020 Edition

BS ISO 16700:2016 – TC:2020 Edition

$186.33

Tracked Changes. Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification

Published By Publication Date Number of Pages
BSI 2020 58
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PDF Catalog

PDF Pages PDF Title
34 Foreword
35 Introduction
37 1 Scope
2 Normative references
3 Terms and definitions
39 4 Image magnification
4.1 Scale marker
4.2 Expressing magnification
5 Reference material
5.1 General
40 5.2 Requirements for CRM
5.3 Pitch patterns on CRM
5.4 Storage and handling
41 6 Calibration procedures
6.1 General
6.2 Mounting CRM
6.3 Setting SEM operation conditions for calibration
42 6.4 Image recording
6.5 Measurement of image
43 6.6 Calibration of magnification and scale marker
6.6.1 General
6.6.2 Magnification
6.6.3 Scale marker
44 7 Accuracy of image magnification and scale marker
45 8 Calibration report
8.1 General
8.2 Contents of calibration report
47 Annex A (informative) Reference materials for magnification
49 Annex B (informative) Parameters that influence the resultant magnification of an SEM
51 Annex C (informative) Uncertainties in magnification measurements
52 Annex D (informative) Example of a test report
54 Bibliography

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BS ISO 16700:2016 - TC
$186.33