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BSI PD IEC TS 62607-9-1:2021:2022 Edition

BSI PD IEC TS 62607-9-1:2021:2022 Edition

$198.66

Nanomanufacturing. Key control characteristics – Traceable spatially resolved nano-scale stray magnetic field measurements. Magnetic force microscopy

Published By Publication Date Number of Pages
BSI 2022 66
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PDF Pages PDF Title
2 undefined
4 CONTENTS
7 FOREWORD
9 INTRODUCTION
10 Figures
Figure 1 – Spatial resolution of magnetic stray field characterizationtechniques and their possible maximum scan area
11 1 Scope
2 Normative references
3 Terms and definitions
3.1 General terms
12 3.2 General terms related to magnetic stray field characterization
13 3.3 Terms related to the measurement method described in this document
18 3.4 Key control characteristics measured according to this document
19 3.5 Symbols and abbreviated terms
20 4 General
4.1 Measurement principle, general
21 Figure 2 – Field measurement with finite-size sensors
22 4.2 Application to scanning systems, discretization
4.3 Preparation of the measurement setup
4.4 Measurement principle, MFM
4.4.1 General
Figure 3 – Schematic MFM setup
23 4.4.2 Field detection process
4.4.3 Lever correction function FLCF
24 Figure 4 – Lever correction function (FLCF) in Fourier space
25 4.4.4 Effective magnetic charge density of the tip
4.4.5 Characteristics of the MFM FICF
Figure 5 – Lever correction function (FLCF) and distance losses
26 4.4.6 Concept of calibration by deconvolution
Figure 6 – Instrument calibration function (FICF ) in real and Fourier space. Line plots of the partial Fourier space (absolute value, left) and real space (right).
27 4.4.7 Regularized deconvolution approach
28 4.5 MFM setup key control characteristics
4.5.1 General
29 4.5.2 Cantilever spring constant C
Tables
Table 1 – MFM setup key control characteristics
30 4.5.3 Cantilever resonance quality factor Q
4.5.4 Sensitivity of the detection and analysis electronics
Figure 7 – Typical resonance curve of a cantilever
31 4.5.5 Measurement height
4.5.6 Scan size, pixel resolution
4.5.7 Canting angle of the cantilever in the setup
4.5.8 Magnetization orientation of the tip
Figure 8 – Typical amplitude–distance plot of a cantileverwith the linear transition region indicated
32 4.5.9 Regularized deconvolution
4.6 Ambient conditions during measurement
4.7 Reference samples
4.7.1 General
4.7.2 “Well-known” and calculable reference sample
4.7.3 Band domain patterns as self-referencing calibration samples
Table 2 – Ambient conditions key control characteristics
33 4.7.4 Detailed stray field calculation procedure for perpendicularly magnetized band domain reference samples
Figure 9 – Band domain reference sample
34 Table 3 – Stray field estimation key control characteristics
35 Table 4 – Stray field estimation protocol
36 5 Measurement procedure for calibrated magnetic field measurements
5.1 Calibrated stray field measurement of a sample under test
37 5.2 Detailed description of the measurement and calibration procedure
5.3 Measurement protocol
38 Table 5 – Measurement protocol
39 5.4 Measurement reliability
5.4.1 Artefacts in MFM measurements
5.4.2 Artefacts resulting from strong stray field samples
40 5.4.3 Artefacts when measuring samples with low coercivity
5.4.4 Distortion of the domain structure
Figure 10 – Artefacts that occur if the tip magnetization is switchedby the stray field of the sample
Figure 11 – Artefacts if the sample domain orientation is switchedby a strong tip stray field
41 5.4.5 Contingency strategy
5.4.6 Strategies to improve the quality of the measurements
5.5 Uncertainty evaluation
5.5.1 General
5.5.2 Reference sample
Figure 12 – Typical distortion of an MFM image: different domain widths
42 5.5.3 ICF determination
5.5.4 Calibrated field measurement
43 6 Data analysis / interpretation of results
6.1 Software for data analysis
Table 6 – Uncertainty evaluation key control characteristics
44 Table 7 – Software implementation of stray field calculation of band domain samples
Table 8 – Software-based realization of calibrated measurement
45 7 Results to be reported
7.1 General
7.2 Product / sample identification
7.3 Test conditions
7.4 Measurement set-up specific information
46 7.5 Test results
8 Validity assessment
8.1 General aspects
47 8.2 Requirements
8.3 Example
8.3.1 Determination of the Instrument Calibration Function FICF
48 Figure 13 – Normalized Fourier amplitudes of the measured referencesample signal Δφref and the reference sample magnetic field
49 8.3.2 Calibrated measurement
Figure 14 – Typical transfer functions in Fourier and real space for different values of the regularization parameter α
Figure 15 – Comparison of the reference sample signal Δφref and the SUT signal ΔφSUT
51 Annex A (informative)Algorithm
A.1 Mathematical basics
A.1.1 Continuous Fourier transform versus discrete Fourier Transform
A.1.2 Partial (two-dimensional) Fourier space
A.1.3 Cross correlation theorem
52 A.2 Magnetic fields in partial Fourier space
A.2.1 Differentiation in partial Fourier space
A.2.2 Magnetic fields in partial Fourier space
A.3 Signal generation in magnetic force microscopy
A.3.1 General
53 A.3.2 MFM phase shift signal
54 A.3.3 L-curve criterion for pseudo-Wiener filter-based deconvolution process
55 Figure A.1 – Plot of the 2-norm of the residual as a functionof the regularization parameter
Figure A.2 – Example of an L-curve
Figure A.3 – Illustration of the curvature of the L-curveas a function of the regularization parameter
56 Annex B (informative)Uncertainty evaluation
B.1 Definition for instrument calibration
B.2 Definition for calibrated field measurement
57 B.3 A type uncertainty evaluation
B.4 B type uncertainty evaluation
B.4.1 General
B.4.2 Propagation of uncertainty from the real to the Fourier domain
58 B.4.3 Propagation of uncertainty from the Fourier to the real space domain
59 B.4.4 Uncertainty propagation based on the Wiener filter
61 B.4.5 Uncertainty evaluation for the tip calibration
62 B.4.6 Uncertainty evaluation for the stray field evaluation
63 B.5 Monte Carlo technique
64 Bibliography

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BSI PD IEC TS 62607-9-1:2021
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