ISO 15632:2012

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Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis

Published By	Publication Date	Number of Pages
ISO	2012-08	18

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Categories: 71.040.99 - Other standards related to analytical chemistry, ISO

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Description

This International Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This International Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this International Standard.

Additional information

Published Code	ISO
Published By	International Organization for Standardization
Publication Date	2012-08
Pages Count	18
Language	English
Edition	2
File Size	245.8 KB
ICS Codes	71.040.99 - Other standards related to analytical chemistry

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ISO 15632:2012

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