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DIN 50989-3:2022 Edition

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Ellipsometry – Part 3: Transparent single layer model

Published By Publication Date Number of Pages
DIN 2022-04 77
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This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε<(index)1>) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

DIN 50989-3
$44.20