{"id":234045,"date":"2024-10-19T15:15:54","date_gmt":"2024-10-19T15:15:54","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iec-63068-22019\/"},"modified":"2024-10-25T09:47:28","modified_gmt":"2024-10-25T09:47:28","slug":"bs-iec-63068-22019","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iec-63068-22019\/","title":{"rendered":"BS IEC 63068-2:2019"},"content":{"rendered":"

IEC 63068-2:2019(E) provides definitions and guidance in use of optical inspection for detecting as-grown defects in commercially available 4H-SiC (Silicon Carbide) epitaxial wafers. Additionally, this document exemplifies optical images to enable the detection and categorization of the defects for SiC homoepitaxial wafers. This document deals with a non-destructive test method for the defects so that destructive methods such as preferential etching are out of scope in this document.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
2<\/td>\nundefined <\/td>\n<\/tr>\n
4<\/td>\nCONTENTS <\/td>\n<\/tr>\n
6<\/td>\nFOREWORD <\/td>\n<\/tr>\n
8<\/td>\nINTRODUCTION <\/td>\n<\/tr>\n
9<\/td>\n1 Scope
2 Normative references
3 Terms and definitions <\/td>\n<\/tr>\n
13<\/td>\n4 Optical inspection method
4.1 General <\/td>\n<\/tr>\n
14<\/td>\n4.2 Principle
4.3 Requirements
4.3.1 Illumination <\/td>\n<\/tr>\n
15<\/td>\n4.3.2 Wafer positioning and focusing
4.3.3 Image capturing
4.3.4 Image processing
4.3.5 Image analysis
4.3.6 Image evaluation
4.3.7 Documentation <\/td>\n<\/tr>\n
16<\/td>\n4.4 Parameter settings
4.4.1 General
4.4.2 Parameter setting process
4.5 Procedure
4.6 Evaluation
4.6.1 General
4.6.2 Mean width of planar and volume defects <\/td>\n<\/tr>\n
17<\/td>\n4.6.3 Evaluation process
4.7 Precision
4.8 Test report <\/td>\n<\/tr>\n
18<\/td>\nAnnex A (informative) Optical inspection images of defects
A.1 General
A.2 Micropipe
Figures
Figure A.1 \u2013 Micropipe <\/td>\n<\/tr>\n
19<\/td>\nA.3 TSD
A.4 TED
Figure A.2 \u2013 TSD <\/td>\n<\/tr>\n
20<\/td>\nA.5 BPD
A.6 Scratch trace
Figure A.3 \u2013 TED
Figure A.4 \u2013 Scratch trace <\/td>\n<\/tr>\n
21<\/td>\nA.7 Stacking fault
A.8 Propagated stacking fault
Figure A.5 \u2013 Stacking fault <\/td>\n<\/tr>\n
22<\/td>\nA.9 Stacking fault complex
Figure A.6 \u2013 Propagated stacking fault <\/td>\n<\/tr>\n
23<\/td>\nA.10 Polytype inclusion
Figure A.7 \u2013 Stacking fault complex <\/td>\n<\/tr>\n
24<\/td>\nFigure A.8 \u2013 Polytype inclusion <\/td>\n<\/tr>\n
25<\/td>\nA.11 Particle inclusion
A.12 Bunched-step segment
Figure A.9 \u2013 Particle inclusion <\/td>\n<\/tr>\n
26<\/td>\nFigure A.10 \u2013 Bunched-step segment <\/td>\n<\/tr>\n
27<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices – Test method for defects using optical inspection<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2019<\/td>\n28<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":234048,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[577,2641],"product_tag":[],"class_list":{"0":"post-234045","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-31-080-99","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/234045","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/234048"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=234045"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=234045"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=234045"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}