This technical specification specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.<\/p>\n
This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology.<\/p>\n
This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.<\/p>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 4<\/td>\n | CONTENTS <\/td>\n<\/tr>\n | ||||||
| 6<\/td>\n | FOREWORD <\/td>\n<\/tr>\n | ||||||
| 8<\/td>\n | INTRODUCTION <\/td>\n<\/tr>\n | ||||||
| 9<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions 3.1 Basic terms <\/td>\n<\/tr>\n | ||||||
| 10<\/td>\n | Figures Figure\u00a01 \u2013 Example of a trapezoidal line feature on a substrate <\/td>\n<\/tr>\n | ||||||
| 11<\/td>\n | Figure\u00a02 \u2013 Examples of feature patterns <\/td>\n<\/tr>\n | ||||||
| 12<\/td>\n | 3.2 Grating terms <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 3.3 Grating types <\/td>\n<\/tr>\n | ||||||
| 14<\/td>\n | Figure\u00a03 \u2013 Examples of 1D line gratings <\/td>\n<\/tr>\n | ||||||
| 15<\/td>\n | Figure\u00a04 \u2013 Example of 2D gratings <\/td>\n<\/tr>\n | ||||||
| 16<\/td>\n | 3.4 Grating quality parameter terms <\/td>\n<\/tr>\n | ||||||
| 19<\/td>\n | 3.5 Measurement method categories for grating characterization <\/td>\n<\/tr>\n | ||||||
| 20<\/td>\n | 4 Symbols and abbreviated terms 5 Grating calibration and quality characterization methods 5.1 Overview 5.2 Global methods <\/td>\n<\/tr>\n | ||||||
| 21<\/td>\n | 5.3 Local methods <\/td>\n<\/tr>\n | ||||||
| 22<\/td>\n | 5.4 Hybrid methods 5.5 Comparison of methods <\/td>\n<\/tr>\n | ||||||
| 23<\/td>\n | 5.6 Other deviations of grating features 5.6.1 General 5.6.2 Out of axis deviations Tables Table\u00a01 \u2013 Comparison of different categories for grating characterization methods <\/td>\n<\/tr>\n | ||||||
| 24<\/td>\n | 5.6.3 Out of plane deviations 5.6.4 Other feature deviations <\/td>\n<\/tr>\n | ||||||
| 25<\/td>\n | 5.7 Filter algorithms for grating quality characterization 6 Reporting of grating characterization results 6.1 General <\/td>\n<\/tr>\n | ||||||
| 26<\/td>\n | 6.2 Grating specifications 6.3 Calibration procedure 6.4 Grating quality parameters <\/td>\n<\/tr>\n | ||||||
| 27<\/td>\n | Annex A (informative) Background information and examples <\/td>\n<\/tr>\n | ||||||
| 29<\/td>\n | Figure\u00a0A.1 \u2013 Result of a calibration of a 280 mm length encoder system which was used as a transfer standard in an international comparison [31] <\/td>\n<\/tr>\n | ||||||
| 30<\/td>\n | Figure\u00a0A.2 \u2013 Filtered (linear profile Spline filter with \u03bbc = 25 mm) results of Figure A.1 Table\u00a0A.1 \u2013 Grating quality parameters of the grating in Figures\u00a0A.1 and A.2 <\/td>\n<\/tr>\n | ||||||
| 32<\/td>\n | Figure\u00a0A.3 \u2013 Calibration of a 1D grating by a metrological SEM Table\u00a0A.2 \u2013 Grating quality parameters of the grating in Figure\u00a0A.3 <\/td>\n<\/tr>\n | ||||||
| 33<\/td>\n | Figure\u00a0A.4 \u2013 Calibration of pitch and straightness deviations on a 2D grating by a metrological SEM <\/td>\n<\/tr>\n | ||||||
| 34<\/td>\n | Table\u00a0A.3 \u2013 Grating quality parameters of the grating in Figure\u00a0A.4 <\/td>\n<\/tr>\n | ||||||
| 35<\/td>\n | Figure\u00a0A.5 \u2013 Results of an international comparison on a 2D grating by different participants and types of instruments <\/td>\n<\/tr>\n | ||||||
| 36<\/td>\n | Annex B (informative) Bravais lattices Figure\u00a0B.1 \u2013 One-dimensional Bravais lattice <\/td>\n<\/tr>\n | ||||||
| 37<\/td>\n | Figure\u00a0B.2 \u2013 The five fundamental two-dimensional Bravais lattices illustrating the primitive vectors a and b and the angle \u03c6 between them <\/td>\n<\/tr>\n | ||||||
| 38<\/td>\n | Figure\u00a0B.3 \u2013 The 14 fundamental three-dimensional Bravais lattices <\/td>\n<\/tr>\n | ||||||
| 39<\/td>\n | Table B.1 \u2013 Bravais lattices volumes <\/td>\n<\/tr>\n | ||||||
| 40<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings<\/b><\/p>\n |